Aeris X-ray reflectometry (XRR)

Built for simplicity

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Aeris meets X-ray Reflectometry: measure thin film and surface roughness with ease. Register for our webinar Register for our webinar

The compact XRD system you already trust for rapid, accurate results; now with integrated X-ray reflectometry (XRR) capabilities. Measure thin film thicknesses (1 – 200 nm) and surface roughness with ease and efficiency with Aeris’ XRR capability.

The Aeris is a compact, powerful benchtop X-ray diffractometer that delivers floor-standing-grade data quality. Designed for both expert and novice users, it provides fast, accurate XRD results in minutes, without the need for dedicated infrastructure or specialist setup. Now with X-ray reflectometry, Aeris brings non-destructive thin film characterization to a compact, accessible platform.

With an alignment-free set-up that anyone can run, seamless switching to powder XRD with no downtime, and automated high-throughput workflows via the Aeris sample changer, Aeris’ XRR capability seamlessly integrates into your lab and meets the evolving demands of your research. Already have an Aeris PIXcel3D? Upgrade now, with no system replacement required and minimal disruption to your processes.

Learn more about what XRR on Aeris can do for you

Whether you're looking to upgrade an existing Aeris system or invest in a new instrument with XRR capability, contact our sales team to request a quote or find more information below:

 

What is XRR?

XRR is an analytical technique used to investigate thin-layered structures, surfaces, and interfaces using the total external reflection of X-rays. Unlike many other surface characterization methods, XRR is non-destructive and works on both crystalline and amorphous materials.

In a reflectometry measurement, the X-ray reflection of a sample is recorded around the critical angle; typically, at very shallow, grazing incidence angles. Below this critical angle, X-rays penetrate only a few nanometers into the material. Above it, penetration depth increases rapidly.

At every interface where electron density changes, a portion of the X-ray beam is reflected. The interference of these partial reflections creates the characteristic oscillation pattern seen in reflectivity data. Analyzing this pattern reveals layer thickness, density, and interface or surface roughness, regardless of whether the material is crystalline, polycrystalline, or amorphous; delivering key insights into the material’s performance.

 

Why XRR on Aeris?

Many XRD platforms also offer XRR, but typically as an add-on to a complex, large-footprint system that demands specialist operation. Aeris takes a different approach, bringing XRR capability to a compact, accessible platform that makes measurements as routine as standard powder XRD measurements, without sacrificing accuracy or throughput.

 

Get the bigger picture

Running XRD and XRR on the same instrument means you can build a complete picture of your thin films – including crystallographic phase, thickness, density, and interface roughness – without transferring samples or coordinating across multiple systems. That continuity matters when you're trying to understand both what a film is made of and how well it will perform.

 

Accessible to the whole lab

No alignment, no dedicated sample stage, no specialist training required. Any researcher can run XRR measurements immediately, reducing errors and keeping workflows moving across the entire team.

 

High throughput for rapid results

Compatible with the Aeris 6-position sample changer, XRR supports automated batch measurements. With no alignment procedure and automated fitting options for reflectivity data, XRR on the Aeris delivers actionable results quickly.

XRR for a range of research

 

Semiconductors & electronics

Gate oxide layers on microchips must hit a precise thickness window: thinner layers will be more prone to defects which can cause severe degradation of transistor performance, whilst too thick and transistors switch slowly, reducing device performance.

Coatings & precious metals

In gold-plated electronics or optical coatings, precise thickness control directly impacts cost. XRR enables fast, non-destructive verification, protecting both quality and margins.

Energy & functional materials

XRR enables precise, non-destructive characterization of thin-film solar cell stacks, helping optimise interface quality and layer control to maximise device efficiency

Features and benefits

Reflectometry made simple

  • Fast, alignment-free XRR that anyone can run
  • XRR capability requires no alignment and no dedicated sample stage, so measurements can be started immediately
  • No specialist knowledge or time-consuming setup required
  • Eliminates common user error and shortens training time
  • Ensures consistent, reproducible results regardless of operator experience

One instrument. Multiple techniques. No downtime.

  • Seamless switching between XRR and powder XRD without reconfiguring the system
  • Enables users to move effortlessly from one project to the next
  • No downtime between techniques
  • Versatile design eliminates the need for a dedicated platform or specialized optics
  • Maximize productivity while simplifying your workflow

Measure more with minimal input

  • High-throughput, low-touch operation
  • Fully compatible with the Aeris sample changer
  • XRR capability supports automated, high‑throughput workflows, freeing up user time
  • Automated batch measurement sequences

Added capability, protected investment

  • Existing Aeris users can upgrade to XRR capability in the field
  • Minimal disruption with no system replacement required
  • Protects the original investment
  • Enables capabilities to grow with application needs
  • Delivers new analytical power with minimal disruption.

Related resources

Speak to a specialist

Book a demo or get expert advice.

Whether you're learning more about XRR or what XRR on Aeris can do for you, our specialists are ready to understand your specific challenges and show you how the Aeris can support your success.

Fill out the form on the right hand side, and a member of our team will reach out to discuss how we can help you.

 

 

 


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